PROBLEM TO BE SOLVED: To prevent a substrate from displacing when transferring from a positioning part to a chucking part.SOLUTION: A vertical conveyance device includes: a positioning loader having a support member and a positioning unit which adjusts the position of a substrate placed on the support member; an adsorption elevating unit which can adsorb to move up and down the substrate placed on the support member; and a chucking process conveyor which conveys the substrate to a scribing unit under the condition of the substrate chucked by the chuck member. Replacement of the substrate from the positioning loader to the chucking process conveyor is carried out by the falling motion of the absorption elevating unit.