The invention provides a mask atomization control method and device. The control method comprises the following steps: (1) selecting out a first number of masks of which the usage frequency is greater than or equal to a preset frequency within a preset time period from to-be-scanned and tested masks; (2) calculating atomization risk values R of various masks in a first number of masks according to the formula R=r1*r2*r3*r4*r5, wherein r1 is the total exposure dose risk value of the masks; r2 is the service life risk value of the masks; r3 is the cleaning frequency risk value of the masks; r4 is the storage mode risk value of the masks; and r5 is the process line width risk value of the masks; and (3) sequentially scanning and testing all or partial masks according to the atomization risk values from high to low, and determining the actually atomized masks according to the scanning and testing result. According to the mask atomization control method and device, the time can be effectively shortened; the cost can be effectively reduced; the atomization control on the masks can be efficiently realized; the stability of device production is facilitated; and the mask atomization control method and device are simple and suitable for industrial detection.