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Invention Grant
CN105398220B 液体喷出装置的制造方法和液体喷出装置 有权

液体喷出装置的制造方法和液体喷出装置
Abstract:
一种液体喷出装置的制造方法和液体喷出装置，该液体喷出装置包括形成有与喷嘴连通的压力室的流路形成部以及压电致动器，该压电致动器具有以覆盖所述压力室的方式被设置在所述流路形成部的振动膜、与所述压力室对应地配置于所述振动膜的压电膜、被配置于所述压电膜的所述振动膜侧的面的第一电极、被配置于所述压电膜的与所述振动膜相反一侧的面的第二电极以及与所述第二电极连接的布线。该液体喷出装置的制造方法包括：布线形成工序，以所述布线的一部分覆盖所述压电膜的方式形成所述布线；电极形成工序，在所述布线形成工序之后，在所述压电膜的与所述振动膜相反一侧的面，以与所述布线导通的方式形成所述第二电极。
Abstract(English):

A method for manufacturing a liquid jetting apparatus includes: a wire formation step of forming a wire (35) so that a part of the wire covers a piezoelectric film; and an electrode formation step of forming a second electrode, after the wire formation step, on a surface of the piezoelectric film on a side far from a vibration film so as to be in electrical conduction with the wire. The liquid jetting apparatus includes: a flow passage formation portion (21) ; and a piezoelectric actuator (22) having the vibration film (30) provided on the flow passage formation portion, the piezoelectric film (32) arranged on the vibration film, a first electrode (31) arranged on a surface of the piezoelectric film on a side near to the vibration film, the second electrode (33) arranged on the surface of the piezoelectric film on the side far from the vibration film, and the wire connected to the second electrode.

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