The invention provides an evaporation deposition pattern detection system and an evaporation deposition pattern detection method. The evaporation deposition pattern detection system is integrated with a white light interference microscope based on a conventional evaporation deposition pattern detection system. When the evaporation deposition pattern detection system is used for detecting an evaporation deposition pattern on a substrate, the white light interference microscope is used for the two-dimensional image and the three-dimensional image of the evaporation deposition pattern on the substrate. The width range of the non-uniform area of the film thickness of the evaporation deposition pattern is acquired according to the two-dimensional image and the three-dimensional image, and the severity degree of the evaporation deposition shadow effect of the substrate is evaluated, and therefore data support is provided for the reduction of the shadow effect.