The invention is suitable for the technical field of dust-removal and filter materials, provides a preparation method of a fluorine-silicon-oxygen superfine modified glass fiber filter material and aims at solving the technical problems in the prior art that a glass fiber is relatively poor in toughness, temperature tolerance and wearing and folding resistance and has relatively poor anti-oxidative performance on sulfur dioxide and other harmful gases. The preparation method comprises the steps of acid steeping, washing, drying, potassium permanganate oxidation treatment, heat cleaning, chemical infiltrating agent steeping, and drying to prepare the finished product. The product produced by the preparation method is good in performance, good in chemical stability, high in strength and low in ductility, and has outstanding wear-resisting property, folding resistance, acid and alkali resistance and corrosion resistance, and the resistant temperature is improved to 600 DEG C or above from about 280 DEG C of an original glass fiber filter material; the glass fiber material can be widely applied to the industries, such as steel, smelting, cement, a coal-fired boiler, carbon black and electric power; the dust collection rate of the fluorine-silicon-oxygen superfine modified glass fiber filter material can reach 99.99%, and the dust emission is lower than 5-20mg/N.m; and therefore, the material has very broad development prospects at home and abroad and great market potential.