The invention discloses a material identification sensor based on a composite capacitance structure and a preparation method thereof. The structure is simple, the volume is small, the cost is low, anda dielectric constant and the elastic modulus can be measured simultaneously to identify the material. The sensor includes a first polar plate and a second polar plate which oppositely displaced, atleast two first electrodes opposite to the first polar plate, and at least one second electrode opposite to the second polar plate; and the preparation method comprises the following steps: coating asubstrate with an adhesion promoter; applying a negative photoresist on the adhesion promoter; performing exposure and development with a masking method, transferring a masking pattern onto the photoresist to obtain a patterned photoresist; sputtering the patterned photoresist surface with a metal film; removing the adhesion promoter, the photoresist, and the metal attached to the surface by a stripping process to form a metal electrode distributed according to a pattern, and thereby obtaining the polar plate; repeating the above steps to prepare the other polar plate, and after the two polarplates are matched, obtaining the material recognition sensor based on the composite capacitance structure.