The inspection fixture of this invention helps ensure the contact accuracy of the front end of a probe with the inspection point of an inspection object, and extends the life of the probe. The inspection fixture of the present invention comprises: an inspection side support having an abutting surface abutting against the inspection object; an electrode side support spaced apart from the inspectionside support; and a plurality of flexible probes. The flexible probes, the base ends of which are connected to the electrode, and the front ends of which protrude from the abutting surface to be in contact with the inspection object, penetrate through the electrode side support and the inspection side support. The electrode side support has a plurality of electrode side support plates arranged inthe arranged direction of the inspection side support and the electrode side support, and each of the electrode side support plates has a first through hole for the probes to penetrate. The first through hole of the electrode side support plate nearest to the inspection side support has a large diameter portion and a small diameter portion. The small diameter portion is apart from the inspectionside support than the large diameter portion, and the diameter of the small diameter portion is smaller than the diameter of the large diameter portion.