The invention provides a method for repairing a chuck of an array exposure machine, the chuck and the array exposure machine. The method for repairing the chuck of the array exposure machine comprisesthe following steps: S1, acquiring a current initial flatness parameter at a target area of the chuck in advance; S2, if the current flatness parameter does not meet a first preset condition, employing a pen made of a preset material to smear the target area for preset times; S3, polishing the smeared target area until the resistance of the target area is smaller than a first threshold value; S4,cleaning the polished target area; S5, detecting the target area to obtain an actual measurement flatness parameter of the target area; S6, if the actually-measured flatness parameter meets the firstpreset condition, completing the repairing. The target area of the chuck is coated with the pen made of the corresponding material, so that the abrasion of the target area is repaired, a better new chuck is not needed, and the cost can be reduced.