A micromachine and a method of manufacturing the same which are suitable as or for a micromachine having a first dynamic fine structural portion constituting a driving portion, and a second static fine structural portion performing a switching function or a function of an optical element, the method comprising forming the second static fine structural portion on the first dynamic fine structural portion, or superposing the second static fine structural portion thereon and die transferring the same thereto, whereby the method enables the second fine structure to be formed without using at least a complicated step, such as a silicon process in an intermediate stage of the method, and into a complicated shape easily with a high reproducibility, and contributes to the improvement of the productivity. Especially, when a plurality of elements are arranged in an arrayed state as in a spatial light modulator, the die transfer techniques enable the second fine structure to be reproduced stably as compared with the techniques using a silicon process for forming all parts of a micromachine, whereby the subject method reduces the probability of occurrence of defects to a remarkably low level and contributes to the improvement of the yield.