Invention Patent
- Patent Title: Rapid exchange device for lithography reticles.
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Application No.: NL1036785Application Date: 2009-03-30
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Publication No.: NL1036785A1Publication Date: 2009-10-20
- Inventor: LANSBERGEN ROBERT GABRIEL MARIA , HARROLD GEORGE HILARY , JOHNSON RICHARD JOHN , WEIJDEN HUGO JACOBUS GERARDUS
- Applicant: ASML NETHERLANDS BV , ASML HOLDING NV
- Assignee: ASML NETHERLANDS BV,ASML HOLDING NV
- Current Assignee: ASML NETHERLANDS BV,ASML HOLDING NV
- Priority: US7126808 2008-04-18
- Main IPC: G03F9/00
- IPC: G03F9/00 ; H01L21/68
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