Invention Grant
- Patent Title: Microelectromechanical systems (MEMS) pressure sensor having a leakage path to a cavity
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Application No.: US14500854Application Date: 2014-09-29
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Publication No.: US10006824B2Publication Date: 2018-06-26
- Inventor: Julius Ming-Lin Tsai , Aleksey S. Khenkin , Baris Cagdaser , James Christian Salvia , Fariborz Assaderaghi
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: G01L9/12
- IPC: G01L9/12 ; G01L9/00 ; G01L19/00 ; G01L27/00 ; H04R19/00 ; H04R19/04
Abstract:
Microelectromechanical systems (MEMS) pressure sensors having a leakage path are described. Provided implementations can comprise a MEMS pressure sensor system associated with a back cavity and a membrane that separates the back cavity and an ambient atmosphere. A pressure of the ambient atmosphere is determined based on a parameter associated with movement of the membrane.
Public/Granted literature
- US20160091378A1 MICROELECTROMECHANICAL SYSTEMS (MEMS) PRESSURE SENSOR HAVING A LEAKAGE PATH TO A CAVITY Public/Granted day:2016-03-31
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