Piezoelectric pressure sensor and process of manufacturing same
Abstract:
A piezoelectric pressure sensor includes a membrane for detecting a pressure profile, a piezoelectric sensor on which polarization charges are produced by the detected pressure profile, an electrode arrangement receiving and transmitting the generated polarization charges as signals via a charge output. The sensor further includes an electrical connecting element and an electrical signal conductor. The electrical connecting element is electrically and mechanically connected to the electrical signal conductor. The charge output is connected to the electrical connecting element in certain areas and transmits signals through the electrical connecting element into the electrical signal conductor.
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