Invention Grant
- Patent Title: Semiconductor structure
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Application No.: US15602610Application Date: 2017-05-23
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Publication No.: US10007059B2Publication Date: 2018-06-26
- Inventor: Stefan Abel , Jean Fompeyrine , Chiara Marchiori
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent David M. Quinn
- Priority: GB1420531.4 20141119
- Main IPC: G02B6/12
- IPC: G02B6/12 ; G02B6/13 ; G02B6/122 ; G02F1/035

Abstract:
A semiconductor structure is provided, the semiconductor structure comprising: a semiconductor substrate processed to comprise at least an optical aspect comprising at least a silicon photonics device and at least an electronic aspect comprising at least an electronic device; at least an interlayer dielectric layer provided on the semiconductor substrate, and at least an electrically interconnecting layer provided on the interlayer dielectric layer, wherein: the semiconductor structure further comprises at least a functional-oxide crystalline layer provided in relation to the interlayer dielectric layer before the interconnecting layer is provided on the interlayer dielectric layer, the functional-oxide crystalline layer comprising at least a functional-oxide material and is processed to comprise at least an active optical device, and the interlayer dielectric layer comprises a first surface and a second surface, the first surface being in common to at least a respective part of the optical aspect and the electronic aspect.
Public/Granted literature
- US20170254950A1 Semiconductor Structure Public/Granted day:2017-09-07
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