Waveguide resonator component and method for the production thereof
Abstract:
A waveguide resonator component, which can be used, for example, in integrated circuits, in which a substrate having two waveguides is present and a microtube is present as resonator, wherein the resonator has a respective recess in the region of each waveguide in order to form an intermediate space between the waveguide and the resonator. The aim is additionally achieved by a method in which a sacrificial layer is applied to a substrate having two waveguides and at least a second layer is applied to the sacrificial layer, and thereafter the sacrificial layer is at least partially removed and the resonator is produced in the form of a microtube by rolling up the second layer and possible additional layers.
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