- Patent Title: Waveguide resonator component and method for the production thereof
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Application No.: US14773064Application Date: 2014-03-13
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Publication No.: US10007064B2Publication Date: 2018-06-26
- Inventor: Stefan Boettner , Oliver G. Schmidt
- Applicant: LEIBNIZ-INSTITUT FUER FESTKOERPER-UND WERKSTOFFFORSCHUNG DRESDEN E.V
- Applicant Address: DE Dresden
- Assignee: LEIBNIZ-INSTITUT FUER FESTKOERPUR-UND WERKSTOFFFORSCHUNG DRESDEN E.V
- Current Assignee: LEIBNIZ-INSTITUT FUER FESTKOERPUR-UND WERKSTOFFFORSCHUNG DRESDEN E.V
- Current Assignee Address: DE Dresden
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: DE102013204606 20130315
- International Application: PCT/EP2014/055006 WO 20140313
- International Announcement: WO2014/140206 WO 20140918
- Main IPC: G02B6/293
- IPC: G02B6/293 ; G02B6/00 ; G02B6/122 ; G02B6/136 ; G02B6/12

Abstract:
A waveguide resonator component, which can be used, for example, in integrated circuits, in which a substrate having two waveguides is present and a microtube is present as resonator, wherein the resonator has a respective recess in the region of each waveguide in order to form an intermediate space between the waveguide and the resonator. The aim is additionally achieved by a method in which a sacrificial layer is applied to a substrate having two waveguides and at least a second layer is applied to the sacrificial layer, and thereafter the sacrificial layer is at least partially removed and the resonator is produced in the form of a microtube by rolling up the second layer and possible additional layers.
Public/Granted literature
- US20160011374A1 WAVEGUIDE RESONATOR COMPONENT AND METHOD FOR THE PRODUCTION THEREOF Public/Granted day:2016-01-14
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