Invention Grant
- Patent Title: Compound for forming organic film, and organic film composition using the same, process for forming organic film, and patterning process
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Application No.: US14856014Application Date: 2015-09-16
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Publication No.: US10007183B2Publication Date: 2018-06-26
- Inventor: Seiichiro Tachibana , Daisuke Kori , Tsutomu Ogihara , Takeru Watanabe , Kazumi Noda , Toshiharu Yano
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2012-137073 20120618
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/40 ; G03F7/09 ; H01L21/308 ; C07C43/23 ; G03F7/075 ; C08F216/10 ; C08G61/12 ; C09D129/02 ; C09D165/00 ; G03F7/20 ; G03F7/32 ; C07C39/17 ; C08K5/13 ; H01L21/02 ; H01L27/12 ; H01L21/311 ; H01L21/027

Abstract:
The invention provides a compound for forming an organic film having a partial structure represented by the following formula (ii), wherein the ring structures Ar1, Ar2 and Ar3 each represent a substituted or unsubstituted benzene ring or naphthalene ring; e is 0 or 1; R0 represents a hydrogen atom or a linear, branched or cyclic monovalent organic group having 1 to 30 carbon atoms; L0 represents a linear, branched or cyclic divalent organic group having 1 to 32 carbon atoms; and the methylene group constituting L0 may be substituted by an oxygen atom or a carbonyl group. There can be provided an organic film composition for forming an organic film having high dry etching resistance as well as advanced filling/planarizing characteristics.
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