Invention Grant
- Patent Title: Systems and methods for controlling temperatures in an epitaxial reactor
-
Application No.: US14318111Application Date: 2014-06-27
-
Publication No.: US10007255B2Publication Date: 2018-06-26
- Inventor: Benno Orschel , Arash Abedijaberi , Gang Wang , Ellen Torack
- Applicant: SunEdison Semiconductor Limited (UEN201334164H)
- Applicant Address: SG Singapore
- Assignee: SunEdison Semiconductor Limited (UEN201334164H)
- Current Assignee: SunEdison Semiconductor Limited (UEN201334164H)
- Current Assignee Address: SG Singapore
- Agency: Armstrong Teasdale LLP
- Main IPC: G05D23/19
- IPC: G05D23/19 ; G05B19/418

Abstract:
A method for controlling temperatures in an epitaxial reactor for use in a wafer-production process is provided. The method is implemented by a computing device coupled to a memory. The method includes transmitting, to a heating device in a first zone of the epitaxial reactor, an output power instruction representing a base output power. The method additionally includes determining an actual time period for a temperature in the first zone of the epitaxial reactor to reach a target temperature, determining a difference between the actual time period and a reference time period, determining an output power offset based on the difference, and storing the output power offset in the memory in association with the heating device.
Public/Granted literature
- US20150378372A1 SYSTEMS AND METHODS FOR CONTROLLING TEMPERATURES IN AN EPITAXIAL REACTOR Public/Granted day:2015-12-31
Information query