Invention Grant
- Patent Title: Dense arrays and charge storage devices
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Application No.: US15368396Application Date: 2016-12-02
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Publication No.: US10008511B2Publication Date: 2018-06-26
- Inventor: Thomas H. Lee
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Plano
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Plano
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; G11C16/34 ; H01L21/822 ; H01L27/06 ; H01L27/112 ; H01L27/115 ; H01L27/11521 ; H01L27/11551 ; H01L27/11556 ; H01L27/11568 ; H01L27/11578 ; H01L29/423 ; H01L29/66 ; H01L29/788 ; H01L29/792 ; H01L29/861 ; H01L27/11558 ; H01L27/11526 ; H01L27/11573 ; H01L29/16 ; G11C16/10 ; G11C16/14 ; G11C16/26 ; H01L29/06 ; H01L29/51 ; G11C16/04 ; H01L21/3105 ; H01L21/768 ; H01L23/528 ; H01L23/532 ; H01L27/11565 ; H01L29/739 ; H01L29/786 ; H01L27/12 ; H01L27/1158
Abstract:
There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.
Public/Granted literature
- US20170084627A1 DENSE ARRAYS AND CHARGE STORAGE DEVICES Public/Granted day:2017-03-23
Information query
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