Invention Grant
- Patent Title: Image sensor having first fixed charge film for anti-reflection and second fixed charge film for moisture protection
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Application No.: US15090883Application Date: 2016-04-05
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Publication No.: US10008535B2Publication Date: 2018-06-26
- Inventor: Seokha Lee , Kyungah Jeon , Yunki Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2015-0113386 20150811
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
An image sensor includes a substrate including a plurality of photoelectric conversion parts and a pixel isolation trench extending from a surface of the substrate between the photoelectric conversion parts, a first fixed charge film directly on the surface of the substrate, a second fixed charge film directly on the first fixed charge film and an inner wall of the pixel isolation trench, and an insulating layer directly on the second fixed charge film, the insulating layer configured to fill the pixel isolation trench.
Public/Granted literature
- US20170047371A1 IMAGE SENSOR HAVING FIXED CHARGE FILM Public/Granted day:2017-02-16
Information query
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