Image sensor having first fixed charge film for anti-reflection and second fixed charge film for moisture protection
Abstract:
An image sensor includes a substrate including a plurality of photoelectric conversion parts and a pixel isolation trench extending from a surface of the substrate between the photoelectric conversion parts, a first fixed charge film directly on the surface of the substrate, a second fixed charge film directly on the first fixed charge film and an inner wall of the pixel isolation trench, and an insulating layer directly on the second fixed charge film, the insulating layer configured to fill the pixel isolation trench.
Public/Granted literature
Information query
Patent Agency Ranking
0/0