Invention Grant
- Patent Title: Thin film transistor and organic EL display device
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Application No.: US15321975Application Date: 2015-06-24
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Publication No.: US10008611B2Publication Date: 2018-06-26
- Inventor: Mitsutaka Matsumoto , Arinobu Kanegae
- Applicant: JOLED INC.
- Applicant Address: JP Tokyo
- Assignee: JOLED INC.
- Current Assignee: JOLED INC.
- Current Assignee Address: JP Tokyo
- Agency: Hauptman Ham, LLP
- Priority: JP2014-131602 20140626
- International Application: PCT/JP2015/003185 WO 20150624
- International Announcement: WO2015/198604 WO 20151230
- Main IPC: H01L29/08
- IPC: H01L29/08 ; H01L29/786 ; H01L29/24 ; H01L29/66 ; H01L21/383 ; H01L21/385 ; H01L27/32 ; H01L27/12

Abstract:
A thin film transistor includes: a substrate; an undercoat layer disposed on the substrate; an oxide semiconductor layer formed above the undercoat layer and including at least indium; a gate insulating layer located opposite the undercoat layer with the oxide semiconductor layer being between the gate insulating layer and the undercoat layer; a gate electrode located opposite the oxide semiconductor layer with the gate insulating layer being between the gate electrode and the oxide semiconductor layer; and a source electrode and a drain electrode electrically connected to the oxide semiconductor layer, wherein fluorine is included in a region which is an internal region in the oxide semiconductor layer and is close to the undercoat layer.
Public/Granted literature
- US20170141231A1 THIN FILM TRANSISTOR AND ORGANIC EL DISPLAY DEVICE Public/Granted day:2017-05-18
Information query
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