Invention Grant
- Patent Title: Imaging systems with front side illuminated near infrared imaging pixels
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Application No.: US13954823Application Date: 2013-07-30
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Publication No.: US10009552B2Publication Date: 2018-06-26
- Inventor: Sergey Velichko , Gennadiy Agranov
- Applicant: Semiconductor Components Industries, LLC
- Applicant Address: US AZ Phoenix
- Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee Address: US AZ Phoenix
- Agency: Treyz Law Group, P.C.
- Agent Zachary D. Hadd
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H04N5/33 ; H01L27/146

Abstract:
An imaging system may include an image sensor having front side illuminated near infrared image sensor pixels. Each pixel may be formed in a graded epitaxial substrate layer such as a graded p-type epitaxial layer or a graded n-type epitaxial layer on a graded p-type epitaxial layer. Each pixel may be separated from an adjacent pixel by an isolation trench formed in the graded epitaxial layer. A deep p-well may be formed within each isolation trench. The isolation trenches and photodiodes for the pixels may be formed in the graded p-type epitaxial layer or the graded n-type epitaxial layer. The graded p-type epitaxial layer may have an increasing concentration of dopants that increases toward the backside of the image sensor. The graded n-type epitaxial layer may have an increasing concentration of dopants that increases toward the front side of the image sensor.
Public/Granted literature
- US20140078310A1 IMAGING SYSTEMS WITH FRONT SIDE ILLUMINATED NEAR INFRARED IMAGING PIXELS Public/Granted day:2014-03-20
Information query
IPC分类: