A method of making a delivery device (10) for therapeutic agent, drug or vaccine is disclosed. The method includes providing a flat panel wafer, forming a plurality of reservoirs, with each reservoir defining a cavity, within the flat panel wafer, and attaching a cover layer (20) across the plurality of reservoirs. The method also includes filling the plurality of reservoirs with at least one of a therapeutic agent, drug, and vaccine to form a plurality of filled reservoirs, and providing a housing portion adjacent each of the plurality of filled reservoirs to form a composed layer. The method also includes separating the composed layer into a plurality of delivery devices, wherein each delivery device includes a reservoir. The delivery device may be suitable for self-injection use.