Invention Grant
- Patent Title: Method of making composite polishing layer for chemical mechanical polishing pad
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Application No.: US14751410Application Date: 2015-06-26
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Publication No.: US10011002B2Publication Date: 2018-07-03
- Inventor: Bainian Qian , Teresa Brugarolas Brufau , Julia Kozhukh , David Michael Veneziale , Yuhua Tong , Diego Lugo , George C. Jacob , Jeffrey B. Miller , Tony Quan Tran , Marc R. Stack , Andrew Wank , Jeffrey James Hendron
- Applicant: Rohm and Haas Electronic Materials CMP Holdings, Inc. , Dow Global Technologies LLC
- Applicant Address: US DE Newark US MI Midland
- Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.,Dow Global Technologies LLC
- Current Assignee: Rohm and Haas Electronic Materials CMP Holdings, Inc.,Dow Global Technologies LLC
- Current Assignee Address: US DE Newark US MI Midland
- Agency: Andrew Edwin Cox Merriam
- Agent Thomas S. Deibert
- Main IPC: B24D18/00
- IPC: B24D18/00 ; B24B37/24 ; B24B37/22 ; C08G18/00

Abstract:
A method of forming a chemical mechanical polishing pad composite polishing layer is provided, including: providing a first polishing layer component of a first continuous non-fugitive polymeric phase having a plurality of periodic recesses; discharging a combination toward the first polishing layer component at a velocity of 10 to 300 msec, filling the plurality of periodic recesses with the combination; allowing the combination to solidify in the plurality of periodic recesses forming a second non-fugitive polymeric phase giving a composite structure; and, deriving the chemical mechanical polishing pad composite polishing layer from the composite structure, wherein the chemical mechanical polishing pad composite polishing layer has a polishing surface on the polishing side of the first polishing layer component; and wherein the polishing surface is adapted for polishing a substrate.
Public/Granted literature
- US20160375552A1 METHOD OF MAKING COMPOSITE POLISHING LAYER FOR CHEMICAL MECHANICAL POLISHING PAD Public/Granted day:2016-12-29
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