Invention Grant
- Patent Title: Imprint apparatus and article manufacturing method
-
Application No.: US14796009Application Date: 2015-07-10
-
Publication No.: US10011056B2Publication Date: 2018-07-03
- Inventor: Tetsuji Okada , Noriyasu Hasegawa , Tosiya Asano
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2014-143653 20140711
- Main IPC: B29C59/00
- IPC: B29C59/00 ; B29C43/02 ; G03F9/00 ; G03F7/00 ; B29C43/58

Abstract:
The present invention provides an imprint apparatus including an amplifier configured to amplify a signal of displacement between a mold and a substrate, and a control unit configured to perform alignment between the mold and the substrate based on the amplified signal, wherein the control unit performs the alignment through a first operation of moving the substrate with respect to the mold in a first direction and a second operation of moving the substrate with respect to the mold in a second direction that is opposite to the first direction, and in the first operation, the control unit sets the gain of the amplifier to a first gain and changes the gain of the amplifier from the first gain to a second gain.
Public/Granted literature
- US20160009021A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2016-01-14
Information query