Invention Grant
- Patent Title: Electrolyte delivery and generation equipment
-
Application No.: US14921602Application Date: 2015-10-23
-
Publication No.: US10011919B2Publication Date: 2018-07-03
- Inventor: Steven T. Mayer , Gregory Kearns , Richard G. Abraham , Lawrence Ossowski
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Weaver Austin Villeneuve & Sampson LLP
- Main IPC: C25D21/18
- IPC: C25D21/18 ; C25B15/08 ; C25B15/02 ; C25B1/00 ; C25D3/30

Abstract:
An apparatus for automatically generating a metal-containing electrolyte (e.g., an electrolyte containing Sn2+ ions and an acid) includes an anolyte chamber configured to house an active anode (e.g., a metallic tin anode), an anolyte, and a sensor (e.g., one or more sensors) measuring a concentration of metal ions in the anolyte; a catholyte chamber configured to house a hydrogen-generating cathode and a catholyte; and a controller having program instructions for processing data from the sensor and for automatically generating an electrolyte having metal ions in a target concentration range in the anolyte chamber. In some embodiments, the apparatus is in communication with an electroplating apparatus and is capable to deliver the generated electrolyte to the electroplating apparatus on demand. In some embodiments, a densitometer and a conductivity meter are together used as sensors, and the apparatus is configured to generate low alpha tin electrolyte containing an acid.
Public/Granted literature
- US20160348265A1 ELECTROLYTE DELIVERY AND GENERATION EQUIPMENT Public/Granted day:2016-12-01
Information query