Invention Grant
- Patent Title: Pressure sensor
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Application No.: US15116967Application Date: 2015-02-27
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Publication No.: US10012557B2Publication Date: 2018-07-03
- Inventor: Isao Shimoyama , Kiyoshi Matsumoto , Hidetoshi Takahashi , Minh-Dung Nguyen , Takeshi Uchiyama , Manabu Oumi , Yoko Shinohara
- Applicant: SEIKO INSTRUMENTS INC. , THE UNIVERSITY OF TOKYO
- Applicant Address: JP Chiba-shi JP Tokyo
- Assignee: SEIKO INSTRUMENTS INC.,THE UNIVERSITY OF TOKYO
- Current Assignee: SEIKO INSTRUMENTS INC.,THE UNIVERSITY OF TOKYO
- Current Assignee Address: JP Chiba-shi JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-050552 20140313
- International Application: PCT/JP2015/055845 WO 20150227
- International Announcement: WO2015/137159 WO 20150917
- Main IPC: G01L1/22
- IPC: G01L1/22 ; G01L9/00

Abstract:
A pressure sensor which detects variation in pressure, the pressure sensor including a cantilever which bends according to a pressure difference between the inside and the outside of a cavity in a sensor main body, and a first gap, a second gap, and a third gap which are formed on a proximal end portion of the cantilever. The first to third gaps electrically partition the proximal end portion of the cantilever into a first support portion, a second support portion, a first displacement detection portion, and a second displacement portion in a second direction orthogonal to a first direction in which the proximal end portion and a distal end portion of the cantilever are connected to each other in plan view. The first and second displacement detection portions detect displacement according to the bending of the cantilever between the first and second support portion.
Public/Granted literature
- US20170131168A1 PRESSURE SENSOR Public/Granted day:2017-05-11
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