Invention Grant
- Patent Title: Probe card and testing method
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Application No.: US15137006Application Date: 2016-04-25
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Publication No.: US10012676B2Publication Date: 2018-07-03
- Inventor: Chang-Ming Liu
- Applicant: GLOBAL UNICHIP CORPORATION , TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu TW Hsinchu
- Assignee: GLOBAL UNICHIP CORPORATION,TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: GLOBAL UNICHIP CORPORATION,TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu TW Hsinchu
- Agency: CKC & Partners Co., Ltd.
- Priority: CN201510682725 20151020
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R1/073 ; G01R31/28

Abstract:
A probe card and a testing method are disclosed herein. The probe card includes a plurality of probe sets arranged as a testing unit. The testing unit is configured to test a plurality of dies in a test region on a wafer, and to move m unit along a first direction and n unit along a second direction when the test complete so as to test the next test region, in which m and n are integers.
Public/Granted literature
- US20170108535A1 PROBE CARD AND TESTING METHOD Public/Granted day:2017-04-20
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