Invention Grant
- Patent Title: Methods, apparatus and system for TDDB testing
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Application No.: US14473937Application Date: 2014-08-29
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Publication No.: US10012687B2Publication Date: 2018-07-03
- Inventor: Suresh Uppal
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams Morgan, P.C.
- Main IPC: G01R31/12
- IPC: G01R31/12 ; G01R31/26 ; G01R31/28 ; G11C29/50 ; G01R31/30 ; G11C11/22 ; G11C11/401

Abstract:
At least one method and system disclosed herein involves performing a time-dependent dielectric breakdown (TDDB) on a plurality of devices. A first device and a second device are provided for testing. A test signal is provided for performing a time-dependent dielectric breakdown (TDDB) test on the first and second devices. A selection signal for selecting said first and second devices for performing said TDDB test. The first and second devices are arranged in series with a first resistor such that based upon said selecting, the test signal is applied substantially simultaneously to the first and second devices through the first resistor. A determination is made as to whether a breakdown and/or a failure of at least one of the first and second devices has occurred based upon a change in voltage across the first resistor.
Public/Granted literature
- US20160061880A1 METHODS, APPARATUS AND SYSTEM FOR TDDB TESTING Public/Granted day:2016-03-03
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