- Patent Title: Modifying operational efficiency by repositioning process apparatus
-
Application No.: US14303059Application Date: 2014-06-12
-
Publication No.: US10012980B2Publication Date: 2018-07-03
- Inventor: Taku Mizutani , Ichiro Namioka , Toshihiko Iijima , Shigenori Todate
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: JP2011-272476 20111213
- Main IPC: G05B19/41
- IPC: G05B19/41 ; H01L21/67 ; G05B19/418 ; H01L21/677

Abstract:
There is provided a production processing system including: a production efficiency improvement device configured to select a processing apparatus that processes workpieces in consideration of a position of each of a plurality of processing apparatuses arranged along a transfer path; and a transfer control device configured to move a transfer apparatus that transfers workpieces from a predetermined position on the transfer path to the selected processing apparatus.
Public/Granted literature
Information query
IPC分类: