Invention Grant
- Patent Title: Innovative image processing in charged particle microscopy
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Application No.: US15590857Application Date: 2017-05-09
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Publication No.: US10014158B1Publication Date: 2018-07-03
- Inventor: Bart Jozef Janssen , Auke van der Heide , Henricus Gerardus Roeven , Jacobus Adrianus Maria Thomassen
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, P.C.
- Agent Michael O. Scheinberg; John E. Hillert
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/20 ; H01J37/26

Abstract:
A method of using a charged particle microscope comprising a source; a specimen holder, for holding a specimen; an illuminator, for irradiating the specimen; a detector; and a controller, for controlling at least some aspects of the microscope's operation. The method comprises the steps of using the detector to acquire a series of component images of a part of the specimen; then successively quantizing each component image and storing it in a memory; recording a quantization error per pixel for each quantized component image, and keeping a running tally of cumulative quantization errors per pixel for the quantized component images; when quantizing a next component image, choosing a quantization polarity for each pixel that will avoid further increasing the total quantization error for each pixel. Finally, combining the component images to assemble a composite image.
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