Invention Grant
- Patent Title: Gas injection device and assisting member
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Application No.: US15101085Application Date: 2014-12-12
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Publication No.: US10014200B2Publication Date: 2018-07-03
- Inventor: Masanao Murata , Takashi Yamaji
- Applicant: MURATA MACHINERY, LTD.
- Applicant Address: JP Kyoto
- Assignee: MURATA MACHINERY, LTD.
- Current Assignee: MURATA MACHINERY, LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2014-022082 20140207
- International Application: PCT/JP2014/083001 WO 20141212
- International Announcement: WO2015/118775 WO 20150813
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/673 ; H01L21/677 ; F17C5/00

Abstract:
A gas injection device a placement portion on which a first or second container is placed, an ejection portion which is placed on the placement portion and ejects a purge gas, and a sealing portion protruding from the placement portion so as to surround a periphery of the ejection portion. The ejection portion, with the purge gas being injected into an inlet of the second container, does not come in contact with the inlet. The sealing portion, with the purge gas being injected into an inlet of the FOUP, does not impede the contact between the ejection portion and the inlet.
Public/Granted literature
- US20160307785A1 GAS INJECTION DEVICE AND ASSISTING MEMBER Public/Granted day:2016-10-20
Information query
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