Invention Grant
- Patent Title: Device and method for aligning substrates
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Application No.: US14406790Application Date: 2012-06-12
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Publication No.: US10014202B2Publication Date: 2018-07-03
- Inventor: Erich Thallner
- Applicant: Erich Thallner
- Agency: Kusner & Jaffe
- International Application: PCT/EP2012/061109 WO 20120612
- International Announcement: WO2013/185803 WO 20131219
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L21/67 ; H01L21/673 ; H01L21/677

Abstract:
A device for aligning and bringing a large-area substrate into contact with a carrier substrate comprising: a substrate holding means for attaching the substrate; a carrier substrate holding means for attaching the carrier substrate; detection means for detection of a peripheral contour of the substrate attached to the substrate holding means and detection of a peripheral contour of the carrier substrate attached to the carrier substrate holding means relative to a contact plane of the substrate with the carrier substrate; aligning means for aligning the substrate relative to the carrier substrate; and contacting means for bringing the substrate into contact with the carrier substrate.
Public/Granted literature
- US20150170950A1 DEVICE AND METHOD FOR ALIGNING SUBSTRATES Public/Granted day:2015-06-18
Information query
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