Invention Grant
- Patent Title: Pick and place device comprising pick arm correction module
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Application No.: US15043013Application Date: 2016-02-12
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Publication No.: US10014203B2Publication Date: 2018-07-03
- Inventor: Kui Kam Lam , Kai Siu Lam , Zhuanyun Zhang , Nim Tak Wong , Chung Yan Lau
- Applicant: ASM Technology Singapore Pte Ltd
- Applicant Address: SG Singapore
- Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee Address: SG Singapore
- Agency: Ostrolenk Faber LLP
- Main IPC: H01L21/68
- IPC: H01L21/68 ; G05B19/404

Abstract:
A semiconductor die pick and place device comprising a handing mechanism comprising a pick arm movable between a placement location and a pick-up location. A reference feature is located on the pick arm, and a light reflecting module is carried by the pick arm. The light reflecting module is operable to reflect an image of the reference feature to an image capturing module such that the reference feature appears to the light reflecting module to be in focus at a virtual position that is equivalent to a position at the pick-up location and/or the placement location.
Public/Granted literature
- US20170236734A1 PICK AND PLACE DEVICE COMPRISING PICK ARM CORRECTION MODULE Public/Granted day:2017-08-17
Information query
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