Invention Grant
- Patent Title: Method and apparatus to assist the processing of deformed substrates
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Application No.: US14944839Application Date: 2015-11-18
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Publication No.: US10014228B2Publication Date: 2018-07-03
- Inventor: James H. Greer , Troy Palm
- Applicant: Rudolph Technologies, Inc.
- Applicant Address: US NJ Flanders
- Assignee: Rudolph Technologies, Inc.
- Current Assignee: Rudolph Technologies, Inc.
- Current Assignee Address: US NJ Flanders
- Agency: Chiesa Shahinian & Giantomasi PC
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/683 ; H01L21/687 ; H01L21/67 ; H01L21/673
Abstract:
A method and apparatus for detecting and handling deformed substrates, thus allowing them to be processed, and for increasing device yield on the substrate is herein disclosed. A sensor detects deformity, then the substrate is flattened, allowing a support to hold it securely.
Public/Granted literature
- US20160148831A1 Method and Apparatus to Assist the Processing of Deformed Substrates Public/Granted day:2016-05-26
Information query
IPC分类:
