An array includes a substrate having a frontside surface and a backside surface. A backside cavity is formed in the backside surface. Backside through vias extend through the substrate from the frontside surface to the backside surface. Embedded component through vias extend through the substrate from the frontside surface to the backside cavity. An embedded component is mounted within the backside cavity and coupled to the embedded component through vias. In this manner, the embedded component is embedded within the substrate. By embedding the embedded component within the substrate, the overall thickness of the array is minimized. Further, by electrically connecting the embedded component to the embedded component through vias, which are relatively short, the impedance between active surface ends of the embedded component through vias and the bond pads of the embedded component is minimized thus providing superior power management. Further, routing space on the frontside surface and/or the backside surface is preserved.