Invention Grant
- Patent Title: Apparatus and method for placing stressors within an integrated circuit device to manage electromigration failures
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Application No.: US15256207Application Date: 2016-09-02
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Publication No.: US10014257B2Publication Date: 2018-07-03
- Inventor: Douglas M. Reber , Mehul D. Shroff , Edward O. Travis
- Applicant: FREESCALE SEMICONDUCTOR, INC.
- Applicant Address: US TX Austin
- Assignee: NXP USA, INC.
- Current Assignee: NXP USA, INC.
- Current Assignee Address: US TX Austin
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/528 ; G06F17/50 ; H01L21/768 ; H01L23/522 ; H01L23/532

Abstract:
An integrated circuit device includes a first line in a first metal layer of the integrated circuit device, wherein the first line forms at least a portion of an interconnect, a second line in a second metal layer of the integrated circuit device, and a first via that couples the first line to the second line. The integrated circuit device further includes a first stressor disposed at a first area of the interconnect, wherein the first area at least partially overlaps the first via, wherein the first stressor alters an electromigration stress profile for the interconnect by altering a stress at the first area to be less tensile.
Public/Granted literature
Information query
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