Invention Grant
- Patent Title: Microchip charge patterning
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Application No.: US13652194Application Date: 2012-10-15
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Publication No.: US10014261B2Publication Date: 2018-07-03
- Inventor: Eugene M. Chow , JengPing Lu , Armin R. Volkel , Bing R. Hsieh , Gregory L. Whiting
- Applicant: Palo Alto Research Center Incorporated
- Applicant Address: US CA Palo Alto
- Assignee: PALO ALTO RESEARCH CENTER INCORPORATED
- Current Assignee: PALO ALTO RESEARCH CENTER INCORPORATED
- Current Assignee Address: US CA Palo Alto
- Agency: Marger Johnson
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/544 ; H01L23/00
Abstract:
A method of forming a charge pattern on a microchip includes depositing a material on the surface of the microchip, and immersing the microchip in a fluid to develop charge in or on the material through interaction with the surrounding fluid.
Public/Granted literature
- US20140106541A1 MICROCHIP CHARGE PATTERNING Public/Granted day:2014-04-17
Information query
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