Invention Grant
- Patent Title: Die bonding with liquid phase solder
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Application No.: US14708375Application Date: 2015-05-11
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Publication No.: US10014272B2Publication Date: 2018-07-03
- Inventor: Dewen Tian , Yiu Ming Cheung , Ming Li
- Applicant: ASM Technology Singapore Pte Ltd
- Applicant Address: SG Singapore
- Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee Address: SG Singapore
- Agency: Ostrolenk Faber LLP
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
A method of bonding a die comprising solder bumps to a substrate comprising bond pads, the method comprising the steps of heating the die from a first temperature to a second temperature, wherein the first temperature is below the melting point of the solder bumps, and the second temperature is above the melting point of the solder bumps; moving the die relative to the substrate to a first height, whereat the solder bumps contact the bond pads; moving the die further away from the substrate to a second height, while maintaining contact between the solder bumps and bond pads; and thereafter cooling the die from the second temperature to a third temperature to allow the solder bumps to solidify so as to bond the die to the substrate.
Public/Granted literature
- US20160336292A1 DIE BONDING WITH LIQUID PHASE SOLDER Public/Granted day:2016-11-17
Information query
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