Invention Grant
- Patent Title: Semiconductor device manufacturing method including implementing elements of memory unit and logic unit
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Application No.: US14961525Application Date: 2015-12-07
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Publication No.: US10014307B2Publication Date: 2018-07-03
- Inventor: YiPeng Chan , Jieqiong Dong , Huajun Jin , Ruling Zhou , Shibi Guo , Bongkil Kim
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee Address: CN
- Agency: Innovation Counsel LLP
- Priority: CN201410843455 20141225
- Main IPC: H01L27/15
- IPC: H01L27/15 ; H01L27/11521 ; H01L29/66 ; H01L21/28 ; H01L29/423 ; H01L29/788 ; H01L27/11524 ; H01L27/11536 ; H01L27/11539 ; H01L27/11541 ; H01L27/11543

Abstract:
A method for manufacturing a semiconductor device includes providing a substrate, a first conductor, a second conductor, a first dielectric, a second dielectric, and a designated region. The first conductor is positioned between the first dielectric and the substrate. The second conductor is positioned between the second dielectric and the substrate. The first designated region is positioned in the substrate. The method includes providing a conductive material layer, which completely covers the first dielectric and the second dielectric. The method includes partially removing the conductive material layer to form a third conductor and a fourth conductor. The first dielectric is positioned between the third conductor and the first conductor. The fourth conductor directly contacts the designated region. The method includes implementing a memory unit using the first conductor and the third conductor and includes implementing a logic unit using the second conductor and the designated region.
Public/Granted literature
- US20160190148A1 SEMICONDUCTOR DEVICE, RELATED MANUFACTURING METHOD, AND RELATED ELECTRONIC DEVICE Public/Granted day:2016-06-30
Information query
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