- Patent Title: Field-effect transistor devices having proximity contact features
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Application No.: US15475631Application Date: 2017-03-31
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Publication No.: US10014331B2Publication Date: 2018-07-03
- Inventor: Hailing Wang , Hanching Fuh , Dylan Charles Bartle , Jerod F. Mason
- Applicant: SKYWORKS SOLUTIONS, INC.
- Applicant Address: US MA Woburn
- Assignee: SKYWORKS SOLUTIONS, INC.
- Current Assignee: SKYWORKS SOLUTIONS, INC.
- Current Assignee Address: US MA Woburn
- Agency: Chang & Hale LLP
- Main IPC: H01L27/13
- IPC: H01L27/13 ; H01L29/10 ; H01L29/06 ; H04B1/44

Abstract:
Field-effect transistor (FET) devices are described herein that include an insulator layer, a field-effect transistor implemented over the insulator layer, a substrate layer implemented under the insulator layer, and a proximity electrode that extends at least partially through the insulator layer and positioned from the FET by a distance that is less than about 5 μm. The FET device can include one or more substrate contact features as well.
Public/Granted literature
- US20170287953A1 FIELD-EFFECT TRANSISTOR DEVICES HAVING PROXIMITY CONTACT FEATURES Public/Granted day:2017-10-05
Information query
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