- Patent Title: Semiconductor device with sidewall passivation and method of making
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Application No.: US14208211Application Date: 2014-03-13
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Publication No.: US10014382B2Publication Date: 2018-07-03
- Inventor: Mrunal A. Khaderbad , Hsueh Wen Tsau , Chia-Ching Lee , Da-Yuan Lee , Hsiao-Kuan Wei , Chih-Chang Hung , Huicheng Chang , Weng Chang
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsin-Chu
- Agency: Cooper Legal Group, LLC
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/51 ; H01L21/768 ; H01L21/3213 ; H01L21/28 ; H01L29/66 ; H01L29/78 ; H01L29/49

Abstract:
One or more semiconductor devices are provided. The semiconductor device comprises a gate body, a conductive prelayer over the gate body, at least one inhibitor film over the conductive prelayer and a conductive layer over the at least one inhibitor film, where the conductive layer is tapered so as to have a top portion width that is greater than the bottom portion width. One or more methods of forming a semiconductor device are also provided, where an etching process is performed to form a tapered opening such that the tapered conductive layer is formed in the tapered opening.
Public/Granted literature
- US20150262827A1 SEMICONDUCTOR DEVICE WITH SIDEWALL PASSIVATION AND METHOD OF MAKING Public/Granted day:2015-09-17
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