Invention Grant
- Patent Title: Multi-MEMS module
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Application No.: US15111224Application Date: 2014-12-04
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Publication No.: US10015600B2Publication Date: 2018-07-03
- Inventor: Wolfgang Pahl , Gregor Feiertag
- Applicant: Epcos AG
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Nixon Peabody LLP
- Priority: DE102014100464 20140116
- International Application: PCT/EP2014/076603 WO 20141204
- International Announcement: WO2015/106880 WO 20150723
- Main IPC: H04R19/04
- IPC: H04R19/04 ; H04R1/04 ; H04R19/00 ; H04R1/40 ; B81B7/00 ; H04R5/027

Abstract:
A multi-MEMS module is specified which can be produced expediently and enables a smaller design. The module comprises a housing having an interior and a first and a second opening, a first MEMS chip and a second MEMS chip. The first MEMS chip is acoustically coupled to the first opening. The second MEMS chip is acoustically coupled to the second opening.
Public/Granted literature
- US20160345106A1 MULTI-MEMS MODULE Public/Granted day:2016-11-24
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