Invention Grant
- Patent Title: Measurement apparatus, calculation method, system, and method of manufacturing article
-
Application No.: US15168656Application Date: 2016-05-31
-
Publication No.: US10016862B2Publication Date: 2018-07-10
- Inventor: Tsuyoshi Yamazaki
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2015-111678 20150601; JP2016-087389 20160425
- Main IPC: G01B11/24
- IPC: G01B11/24 ; B23P19/04 ; G01B11/25 ; B25J19/02 ; G06T1/00 ; G06T7/521

Abstract:
The present invention provides a measurement apparatus for measuring a shape of an object to be measured, including a processing unit configured to obtain information on the shape of the object to be measured based on an image obtained by imaging the object to be measured onto which pattern light alternately including a bright portion and a dark portion along a first direction is projected, wherein the processing unit obtains a plurality of first signals different from each other and indicating a light intensity distribution in a second direction intersecting the first direction, from a region of the image, which corresponds to the dark portion.
Public/Granted literature
- US20160346882A1 MEASUREMENT APPARATUS, CALCULATION METHOD, SYSTEM, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2016-12-01
Information query