Invention Grant
- Patent Title: Interferometric measuring device with detectors set at different angular ranges
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Application No.: US13667309Application Date: 2012-11-02
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Publication No.: US10018460B2Publication Date: 2018-07-10
- Inventor: Matthias Schussler , Christian Rembe , Alexander Drabenstedt , Robert Kowarsch , Wanja Ochs
- Applicant: Polytec GmbH
- Applicant Address: DE Waldbronn
- Assignee: Polytec GmbH
- Current Assignee: Polytec GmbH
- Current Assignee Address: DE Waldbronn
- Agency: Volpe and Koenig, P.C.
- Priority: DE102011085599 20111102
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/14 ; G01H9/00

Abstract:
A device for the interferometric measuring of an object, including a light source to generate an emitted beam, a beam splitting device for splitting the emitted beam into a measuring beam and at least first and second reference beams, an optic interference device, and first and second detectors, with the interference device and the first detector being embodied cooperating such that the measuring beam, at least partially reflected by the object, and the first reference beam are interfered on at least one detector area of the first detector. The interference device and the second detector are embodied cooperating such that the measuring beam, at least partially scattered by the object, and the second reference beam are interfered on at least one detector area of the second detector. A method is also provided for the interferometric measuring of an object.
Public/Granted literature
- US20130107276A1 DEVICE AND METHOD FOR INTERFEROMETRIC MEASURING OF AN OBJECT Public/Granted day:2013-05-02
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