Invention Grant
- Patent Title: Imprint apparatus and method of manufacturing article
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Application No.: US14373533Application Date: 2013-01-09
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Publication No.: US10018909B2Publication Date: 2018-07-10
- Inventor: Tsuyoshi Arai
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2012-024522 20120207
- International Application: PCT/JP2013/050702 WO 20130109
- International Announcement: WO2013/118546 WO 20130815
- Main IPC: B29C59/02
- IPC: B29C59/02 ; G03F7/00 ; G11B5/84 ; G11B5/855 ; B29C43/00 ; B41L19/00 ; B29C43/58 ; B82Y10/00 ; B82Y40/00 ; B29C59/00 ; G01B21/08

Abstract:
The present invention provides an imprint apparatus which performs an imprint process of transferring a pattern onto a substrate, the apparatus comprising a deforming unit configured to deform the pattern surface by applying a force to the mold, an obtaining unit configured to obtain thickness information of the mold, a calculation unit configured to calculate a force to be applied to the mold based on the thickness information of the mold obtained by the obtaining unit, so that the pattern surface has a target shape in the imprint process, and a control unit configured to control the deforming unit to apply the force calculated by the calculation unit to the mold in the imprint process.
Public/Granted literature
- US20150001749A1 IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2015-01-01
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