Invention Grant
- Patent Title: Split rail structures located in adjacent metal layers
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Application No.: US15294286Application Date: 2016-10-14
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Publication No.: US10020261B2Publication Date: 2018-07-10
- Inventor: Chia-Tien Wu , Hsiang-Wei Liu , Wei-Chen Chu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/535 ; H01L23/522 ; H01L23/528 ; H01L21/768

Abstract:
A first metal layer of a semiconductor device includes a plurality of first metal lines that each extend along a first axis, and a first rail structure that extends along the first axis. The first rail structure is physically separated from the first metal lines. A second metal layer is located over the first metal layer. The second metal layer includes a plurality of second metal lines that each extend along a second axis orthogonal to the first axis, and a second rail structure that extends along the first axis. The second rail structure is physically separated from the second metal lines. The second rail structure is located directly over the first rail structure. A plurality of vias is located between the first metal layer and the second metal layer. A subset of the vias electrically interconnects the first rail structure to the second rail structure.
Public/Granted literature
- US20180108611A1 SPLIT RAIL STRUCTURES LOCATED IN ADJACENT METAL LAYERS Public/Granted day:2018-04-19
Information query
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