Invention Grant
- Patent Title: ESD protection device
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Application No.: US15646571Application Date: 2017-07-11
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Publication No.: US10020298B2Publication Date: 2018-07-10
- Inventor: Noboru Kato , Toshiyuki Nakaiso
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo-Shi, Kyoto-Fu
- Agency: Arent Fox LLP
- Priority: JP2013-079978 20130405; JP2013-126659 20130617
- Main IPC: H01L23/12
- IPC: H01L23/12 ; H01L21/4763 ; H01L27/02 ; H01L23/528 ; H01L23/00 ; H01L23/60 ; H01L23/532 ; H01L23/525
Abstract:
The present invention is provided with a Si substrate, an ESD protection circuit formed in the Si substrate, pads formed on the surface of the Si substrate and electrically connected to first and second input/output terminals of the ESD protection circuit, a rewiring layer formed on the surface of the Si substrate for electrically connecting the pads and metal plated films, and an insulating resin film formed on the rear surface of the Si substrate. Thus, provided is an ESD protection device which can suppress the influence of external noise, etc.
Public/Granted literature
- US20170317069A1 ESD PROTECTION DEVICE Public/Granted day:2017-11-02
Information query
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