Invention Grant
- Patent Title: Wafer-level back-end fabrication systems and methods
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Application No.: US15275134Application Date: 2016-09-23
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Publication No.: US10020343B2Publication Date: 2018-07-10
- Inventor: Edward K. Huang , Andrew D. Hood , Bryan Gall , Paula Heu , Richard E. Bornfreund
- Applicant: FLIR Systems, Inc.
- Applicant Address: US OR Wilsonville
- Assignee: FLIR Systems, Inc.
- Current Assignee: FLIR Systems, Inc.
- Current Assignee Address: US OR Wilsonville
- Agency: Haynes and Boone, LLP
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H04N5/33

Abstract:
Systems and methods may be provided for fabricating infrared focal plane arrays. The methods include providing a device wafer, applying a coating to the device wafer, mounting the device wafer to a first carrier wafer, thinning the device wafer while the device wafer is mounted to the first carrier wafer, releasing the device wafer from the first carrier wafer, singulating the device wafer into individual dies, each die having an infrared focal plane array, and hybridizing the individual dies to a read out integrated circuit.
Public/Granted literature
- US20170207271A1 WAFER-LEVEL BACK-END FABRICATION SYSTEMS AND METHODS Public/Granted day:2017-07-20
Information query
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