Invention Grant
- Patent Title: Method for manufacturing a bipolar junction transistor
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Application No.: US15452780Application Date: 2017-03-08
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Publication No.: US10020387B2Publication Date: 2018-07-10
- Inventor: Dirk Manger , Stefan Tegen
- Applicant: Infineon Technologies Dresden GmbH
- Applicant Address: DE Dresden
- Assignee: Infineon Technologies Dresden GmbH
- Current Assignee: Infineon Technologies Dresden GmbH
- Current Assignee Address: DE Dresden
- Agency: Harrity & Harrity, LLP
- Priority: DE102016207536 20160502
- Main IPC: H01L27/082
- IPC: H01L27/082 ; H01L27/102 ; H01L29/737 ; H01L29/06 ; H01L29/08 ; H01L29/16 ; H01L29/165 ; H01L29/36 ; H01L29/66 ; H01L29/10

Abstract:
Embodiments provide a method for manufacturing a bipolar junction transistor, comprising: providing a semiconductor substrate comprising a buried layer of a first conductive type; doping the semiconductor substrate in a collector implant region, to obtain a collector implant of the first conductive type extending parallel to a surface of the semiconductor substrate and from the surface of the semiconductor substrate to the buried layer; providing a base layer of a second conductive type on the surface of the semiconductor substrate, the base layer covering the collector implant; providing a sacrificial emitter structure on the base layer, wherein a projection of an area of the sacrificial emitter structure is enclosed by an area of the collector implant; and partially counter doping the collector implant through an area of the base layer surrounding an area of the base layer that is covered by the sacrificial emitter structure.
Public/Granted literature
- US20170317198A1 METHOD FOR MANUFACTURING A BIPOLAR JUNCTION TRANSISTOR Public/Granted day:2017-11-02
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