Invention Grant
- Patent Title: Method and systems to control optical transmissivity of a polish pad material
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Application No.: US14626256Application Date: 2015-02-19
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Publication No.: US10022842B2Publication Date: 2018-07-17
- Inventor: Thomas West , Gary Quigley , Pepito Galvez , Peter McKeever , Suli Holani
- Applicant: Thomas West, Inc.
- Applicant Address: US CA Sunnyvale
- Assignee: Thomas West, Inc.
- Current Assignee: Thomas West, Inc.
- Current Assignee Address: US CA Sunnyvale
- Agency: Carr & Ferrell LLP
- Main IPC: B24B49/12
- IPC: B24B49/12 ; B24D13/14 ; B24D11/00

Abstract:
A method and systems for controlling optical transmissivity of a polish pad material are provided. The method and systems may include adjusting control parameters to determine the optical transmissivity of a polish pad material. The control parameters may also include pre-processing controls, casting controls, and/or curing controls. Methods and systems also provided for assembling a polish pad that controls the optical transmissivity of the polish pad. Additionally, a polish pad with a controlled optical transmissivity is provided.
Public/Granted literature
- US20170203411A9 Method and Systems to Control Optical Transmissivity of a Polish Pad Material Public/Granted day:2017-07-20
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