Invention Grant
- Patent Title: Microintegrated encapsulated MEMS sensor with mechanical decoupling and manufacturing process thereof
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Application No.: US14838100Application Date: 2015-08-27
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Publication No.: US10023461B2Publication Date: 2018-07-17
- Inventor: Andrea Picco
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: ITTO2014A0900 20141031
- Main IPC: H01L21/46
- IPC: H01L21/46 ; H01L29/84 ; B81B7/00 ; B81C1/00 ; G01L9/00

Abstract:
The microintegrated sensor comprises a stack formed by a sensor layer, of semiconductor material, by a cap layer, of semiconductor material, and by an insulating layer. The sensor layer and the cap layer have a respective peripheral portion surrounding a central portion, and the insulating layer extends between the peripheral portions of the sensor layer and of the cap layer. An air gap extends between the central portions of the sensor layer and of the protection layer. A through trench extends into the central portion of the sensor layer as far as the air gap and surrounds a platform housing a sensitive element. The cap layer has through holes in the insulating layer that extend from the air gap and form a fluidic path with the air gap and the through trench.
Public/Granted literature
- US20160122181A1 MICROINTEGRATED ENCAPSULATED MEMS SENSOR WITH MECHANICAL DECOUPLING AND MANUFACTURING PROCESS THEREOF Public/Granted day:2016-05-05
Information query
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